ガス流通方法

Method for circulating gas

Abstract

PROBLEM TO BE SOLVED: To provide a method for circulating gas, circulating gas while efficiently heating the inside of a pipe by a heater installation portion having a simple mechanism. SOLUTION: In the method for circulating gas, the pipe 101b including a heating means is connected to a treatment device 106 or 107, and treating gas is circulated through the pipe 101b including the heating means. The heating means has a rod-like heating element placed along a gas flow passage in the pipe 101b, and circulates the treating gas while heating the treating gas with the inside of the pipe 101b depressurized. COPYRIGHT: (C)2011,JPO&INPIT
【課題】シンプルな機構のヒータ設置部により配管内を効率良く加熱しつつ、ガスを流通させることができるガス流通方法を提供することを目的とする。 【解決手段】加熱手段を備えた配管101bを処理装置106又は107に接続し、加熱手段を備えた配管101bを通して処理ガスを流通させるガス流通方法であって、加熱手段は、配管101b内にガス流路に沿って置かれた棒状の発熱体を有し、配管101b内を減圧した状態で処理ガスを加熱しつつ流通させる。 【選択図】図10

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